High Power Impulse Magnetron Sputtering

Written By Daniel Lundin
High Power Impulse Magnetron Sputtering
  • Publsiher : Elsevier
  • Release : 28 August 2019
  • ISBN : 0128124555
  • Pages : 398 pages
  • Rating : 5/5 from 1 reviews
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Download or read book entitled High Power Impulse Magnetron Sputtering by author: Daniel Lundin which was release on 28 August 2019 and published by Elsevier with total page 398 pages . This book available in PDF, EPUB and Kindle Format. High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various target materials. In addition, the role of self-sputtering, secondary electron emission and the importance of controlling the process gas dynamics, both inert and reactive gases, are examined in detail with an aim to generate stable HiPIMS processes. Lastly, the book also looks at how to characterize the HiPIMS discharge, including essential diagnostic equipment. Experimental results and simulations based on industrially relevant material systems are used to illustrate mechanisms controlling nucleation kinetics, column formation and microstructure evolution. Includes a comprehensive description of the HiPIMS process from fundamental physics to applications Provides a distinctive link between the process plasma and thin film communities Discusses the industrialization of HiPIMS and its real world applications

High Power Impulse Magnetron Sputtering

High Power Impulse Magnetron Sputtering
  • Author : Daniel Lundin,Tiberiu Minea,Jon Tomas Gudmundsson
  • Publisher : Elsevier
  • Release Date : 2019-08-28
  • Total pages : 398
  • ISBN : 0128124555
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Summary : High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various ...

Plasma Flares in High Power Impulse Magnetron Sputtering

Plasma Flares in High Power Impulse Magnetron Sputtering
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2012
  • Total pages : 212
  • ISBN : 0128124555
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Summary : Read online Plasma Flares in High Power Impulse Magnetron Sputtering written by , published by which was released on 2012. Download full Plasma Flares in High Power Impulse Magnetron Sputtering Books now! Available in PDF, ePub and Kindle....

Discharge Physics of High Power Impulse Magnetron Sputtering

Discharge Physics of High Power Impulse Magnetron Sputtering
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2010
  • Total pages : 212
  • ISBN : 0128124555
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Summary : High power impulse magnetron sputtering (HIPIMS) is pulsed sputtering where the peak power exceeds the time-averaged power by typically two orders of magnitude. The peak power density, averaged over the target area, can reach or exceed 107 W/m2, leading to plasma conditions that make ionization of the sputtered atoms very ...

Erratum

Erratum
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2007
  • Total pages : 212
  • ISBN : 0128124555
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Summary : Read online Erratum written by , published by which was released on 2007. Download full Erratum Books now! Available in PDF, ePub and Kindle....

Plasma Diagnosis of Reactive High Power Impulse Magnetron Sputtering HiPIMS Discharges

Plasma Diagnosis of Reactive High Power Impulse Magnetron Sputtering  HiPIMS  Discharges
  • Author : Michael Bowes
  • Publisher : Unknown
  • Release Date : 2014
  • Total pages : 212
  • ISBN : 0128124555
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Summary : Read online Plasma Diagnosis of Reactive High Power Impulse Magnetron Sputtering HiPIMS Discharges written by Michael Bowes, published by which was released on 2014. Download full Plasma Diagnosis of Reactive High Power Impulse Magnetron Sputtering HiPIMS Discharges Books now! Available in PDF, ePub and Kindle....

Deposition Rates of High Power Impulse Magnetron Sputtering

Deposition Rates of High Power Impulse Magnetron Sputtering
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2009
  • Total pages : 18
  • ISBN : 0128124555
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Summary : Deposition by high power impulse magnetron sputtering (HIPIMS) is considered by some as the new paradigm of advanced sputtering technology, yet this is met with skepticism by others for the reported lower deposition rates, if compared to rates of more conventional sputtering of equal average power. In this contribution, the ...

High Power Impulse Magnetron Sputtering and Related Discharges

High Power Impulse Magnetron Sputtering and Related Discharges
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2009
  • Total pages : 11
  • ISBN : 0128124555
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Summary : High power impulse magnetron sputtering (HIPIMS) and related self-sputtering techniques are reviewed from a viewpoint of plasma-based ion implantation and deposition (PBII & D). HIPIMS combines the classical, scalable sputtering technology with pulsed power, which is an elegant way of ionizing the sputtered atoms. Related approaches, such as sustained self-sputtering, are ...

Fundamentals of High Power Impulse Magnetron Sputtering

Fundamentals of High Power Impulse Magnetron Sputtering
  • Author : Johan Böhlmark,Linköpings universitet. Institutionen för fysik, kemi och biologi
  • Publisher : Unknown
  • Release Date : 2006
  • Total pages : 64
  • ISBN : 0128124555
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Summary : Read online Fundamentals of High Power Impulse Magnetron Sputtering written by Johan Böhlmark,Linköpings universitet. Institutionen för fysik, kemi och biologi, published by which was released on 2006. Download full Fundamentals of High Power Impulse Magnetron Sputtering Books now! Available in PDF, ePub and Kindle....

High Power Impulse Magnetron Sputtering HIPIMS FundamentalPlasma Studies and Materials Synthesis

High Power Impulse Magnetron Sputtering  HIPIMS    FundamentalPlasma Studies and Materials Synthesis
  • Author : Ante Hecimovic
  • Publisher : Unknown
  • Release Date : 2009
  • Total pages : 212
  • ISBN : 0128124555
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Summary : Read online High Power Impulse Magnetron Sputtering HIPIMS FundamentalPlasma Studies and Materials Synthesis written by Ante Hecimovic, published by which was released on 2009. Download full High Power Impulse Magnetron Sputtering HIPIMS FundamentalPlasma Studies and Materials Synthesis Books now! Available in PDF, ePub and Kindle....

6th International Conference on High Power Impulse Magnetron Sputtering HIPIMS 2015

6th International Conference on High Power Impulse Magnetron Sputtering  HIPIMS 2015
  • Author : Ralf Bandorf
  • Publisher : Unknown
  • Release Date : 2016
  • Total pages : 212
  • ISBN : 0128124555
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Summary : Read online 6th International Conference on High Power Impulse Magnetron Sputtering HIPIMS 2015 written by Ralf Bandorf, published by which was released on 2016. Download full 6th International Conference on High Power Impulse Magnetron Sputtering HIPIMS 2015 Books now! Available in PDF, ePub and Kindle....

Plasma anti assistance And self assistance to High Power Impulse Magnetron Sputtering

Plasma anti assistance  And self assistance  to High Power Impulse Magnetron Sputtering
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2009
  • Total pages : 19
  • ISBN : 0128124555
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Summary : A plasma assistance system was investigated with the goal to operate high power impulse magnetron sputtering (HiPIMS) at lower pressure than usual, thereby to enhance the utilization of the ballistic atoms and ions with high kinetic energy in the film growth process. Gas plasma flow from a constricted plasma source ...

Modeling High Power Impulse Magnetron Sputtering Discharges

Modeling High Power Impulse Magnetron Sputtering Discharges
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2012
  • Total pages : 52
  • ISBN : 0128124555
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Summary : Read online Modeling High Power Impulse Magnetron Sputtering Discharges written by , published by which was released on 2012. Download full Modeling High Power Impulse Magnetron Sputtering Discharges Books now! Available in PDF, ePub and Kindle....

Method and Apparatus for Improved High Power Impulse Magnetron Sputtering

Method and Apparatus for Improved High Power Impulse Magnetron Sputtering
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 2013
  • Total pages : 212
  • ISBN : 0128124555
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Summary : A high power impulse magnetron sputtering apparatus and method using a vacuum chamber with a magnetron target and a substrate positioned in the vacuum chamber. A field coil being positioned between the magnetron target and substrate, and a pulsed power supply and/or a coil bias power supply connected to ...

Invasive and Non invasive Diagnostics of High Power Impulse Magnetron Sputtering HiPIMS Discharges

Invasive and Non invasive Diagnostics of High Power Impulse Magnetron Sputtering  HiPIMS  Discharges
  • Author : Bernd Liebig
  • Publisher : Unknown
  • Release Date : 2013
  • Total pages : 212
  • ISBN : 0128124555
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Summary : Read online Invasive and Non invasive Diagnostics of High Power Impulse Magnetron Sputtering HiPIMS Discharges written by Bernd Liebig, published by which was released on 2013. Download full Invasive and Non invasive Diagnostics of High Power Impulse Magnetron Sputtering HiPIMS Discharges Books now! Available in PDF, ePub and Kindle....

Investigation of industrially suited processes for deposition of oxide thin films by high power impulse magnetron sputtering

Investigation of industrially suited processes for deposition of oxide thin films by high power impulse magnetron sputtering
  • Author : Felipe de Campos Carreri
  • Publisher : BoD – Books on Demand
  • Release Date : 2018-02-26
  • Total pages : 218
  • ISBN : 0128124555
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Summary : The scope of this work is to investigate and to develop advanced HIPIMS processes for deposition of oxides, utilizing industrial-scale equipment and technology. Two classes of oxide materials were studied: insulating (aluminum oxide) and conducting oxides (indium-tin oxide and aluminum-doped zinc oxide). The electrical properties of the oxides have a ...