Handbook of Sputter Deposition Technology

Written By Kiyotaka Wasa
Handbook of Sputter Deposition Technology
  • Publsiher : William Andrew
  • Release : 21 April 2021
  • ISBN : 1437734839
  • Pages : 644 pages
  • Rating : /5 from reviews
GET THIS BOOKHandbook of Sputter Deposition Technology


Download or read book entitled Handbook of Sputter Deposition Technology by author: Kiyotaka Wasa which was release on 21 April 2021 and published by William Andrew with total page 644 pages . This book available in PDF, EPUB and Kindle Format. Sputtering is a Physical Vapor Deposition vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and scientific purposes. Sputtering occurs when an ionized gas molecule is used to displace atoms of a specific material. These atoms then bond at the atomic level to a substrate and create a thin film. Several types of sputtering processes exist, including: ion beam, diode, and magnetron sputtering. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallic coatings. High temperature, diamond films and ferroelectric materials are other applications. Sputtering applications are important across a wide range of industries, including the automotive, medical, semiconductors, space, plastics, and military sectors. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.

Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology
  • Author : Kiyotaka Wasa,Isaku Kanno,Hidetoshi Kotera
  • Publisher : William Andrew
  • Release Date : 2012
  • Total pages : 644
  • ISBN : 1437734839
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Summary : Sputtering is a Physical Vapor Deposition vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and scientific purposes. Sputtering occurs when an ionized gas molecule is used to displace atoms of a specific material. These atoms then bond at the atomic level ...

Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology
  • Author : Shigeru Hayakawa
  • Publisher : William Andrew Publishing
  • Release Date : 1992-01-01
  • Total pages : 304
  • ISBN : 1437734839
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Summary : A concise, comprehensive overview of sputter deposition technology├╣a key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ...

Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings
  • Author : Peter M. Martin
  • Publisher : William Andrew
  • Release Date : 2009-12-01
  • Total pages : 936
  • ISBN : 1437734839
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Summary : This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. ...

Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings
  • Author : Rointan Framroze Bunshah
  • Publisher : William Andrew
  • Release Date : 1994
  • Total pages : 861
  • ISBN : 1437734839
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Summary : This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications....

Handbook of Physical Vapor Deposition PVD Processing

Handbook of Physical Vapor Deposition  PVD  Processing
  • Author : D. M. Mattox
  • Publisher : Cambridge University Press
  • Release Date : 2014-09-19
  • Total pages : 944
  • ISBN : 1437734839
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Summary : This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films ...

Handbook of Thin Film Deposition Processes and Techniques

Handbook of Thin Film Deposition Processes and Techniques
  • Author : Krishna Seshan
  • Publisher : William Andrew
  • Release Date : 2001-02-01
  • Total pages : 430
  • ISBN : 1437734839
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Summary : New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. ...

Handbook of Hard Coatings

Handbook of Hard Coatings
  • Author : Rointan F. Bunshah,Christian Weissmantel
  • Publisher : Cambridge University Press
  • Release Date : 2001
  • Total pages : 550
  • ISBN : 1437734839
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Summary : Written by 12 leading experts, this is an essential resource for fabrication, characterization and applications in the field of hard coatings and wear resistant surfaces. Offering complete explanations of commercially oriented deposition technology, from traditional vacuum. Includes a detailed introduction to the science of characterizing and measuring hard coatings....

Handbook of Carbon Graphite Diamonds and Fullerenes

Handbook of Carbon  Graphite  Diamonds and Fullerenes
  • Author : Hugh O. Pierson
  • Publisher : William Andrew
  • Release Date : 1993
  • Total pages : 399
  • ISBN : 1437734839
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Summary : This book is a review of the science and technology of the element carbon and its allotropes: graphite, diamond and the fullerenes. This field has expanded greatly in the last three decades stimulated by many major discoveries such as carbon fibers, low-pressure diamond and the fullerenes. These carbon materials are ...

Handbook of Optical Properties

Handbook of Optical Properties
  • Author : Rolf E. Hummel,Karl H. Guenther
  • Publisher : CRC Press
  • Release Date : 1995-02-24
  • Total pages : 384
  • ISBN : 1437734839
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Summary : Thin Films for Optical Coating emphasizes the applications of thin films, deposition of thin films, and thin film characterization. Unlike monographs on this subject, this book presents the views of many expert authors. Individual chapters span a wide arc of topics within this field of study. The book offers an ...

Handbook of Ion Beam Processing Technology

Handbook of Ion Beam Processing Technology
  • Author : Jerome J. Cuomo,Stephen M. Rossnagel,Harold R. Kaufman,Stephen M. Haber
  • Publisher : William Andrew
  • Release Date : 1989
  • Total pages : 438
  • ISBN : 1437734839
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Summary : Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films....

Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI ULSI Applications

Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI  ULSI Applications
  • Author : John E.J. Schmitz
  • Publisher : William Andrew
  • Release Date : 1992
  • Total pages : 235
  • ISBN : 1437734839
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Summary : This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume. The book supplies the reader with the necessary background to bring up, fine tune, and successfully maintain a CVD-W process in a production set-up. Materials deposition chemistry, equipment, process ...

Handbook of Ceramics Grinding Polishing

Handbook of Ceramics Grinding   Polishing
  • Author : Ioan D. Marinescu,Hans Kurt Tonshoff,Ichiro Inaski
  • Publisher : William Andrew
  • Release Date : 2000-01-14
  • Total pages : 477
  • ISBN : 1437734839
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Summary : Focusing on the machining of ceramic materials such as silicon nitride, carbide and zirconia, this handbook provides a clear understanding of modern improvements in ceramic processing. The 20 international experts chapter authors describe the properties and characteristics of ceramics, the various types of abrasive processes, and typical tests used in the ...

Contacts to Semiconductors

Contacts to Semiconductors
  • Author : L. J. Brillson
  • Publisher : William Andrew
  • Release Date : 1993
  • Total pages : 680
  • ISBN : 1437734839
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Summary : The authors present the state of the art in growing, processing, and characterizing electronic junctions. Overall, they have assembled a broad array of the latest semiconductor interface science and technology, ranging from advanced ohmic, Schottky, and heterojunction contacts to the refined perspectives of microscopic junctions gleaned from ultrahigh vacuum surface ...

Ceramic Cutting Tools

Ceramic Cutting Tools
  • Author : E. Dow Whitney
  • Publisher : William Andrew
  • Release Date : 1994
  • Total pages : 357
  • ISBN : 1437734839
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Summary : Interest in ceramics as a high speed cutting tool material is based primarily on favorable material properties. As a class of materials, ceramics possess high melting points, excellent hardness and good wear resistance. Unlike most metals, hardness levels in ceramics generally remain high at elevated temperatures which means that cutting ...

Diamond Films and Coatings

Diamond Films and Coatings
  • Author : Robert F. Davis
  • Publisher : William Andrew
  • Release Date : 1993
  • Total pages : 421
  • ISBN : 1437734839
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Summary : Reviews diamond films and coatings covering their properties, growth, deposition, characterization, and applications....