Handbook of Silicon Wafer Cleaning Technology

Written By Karen Reinhardt
Handbook of Silicon Wafer Cleaning Technology
  • Publsiher : William Andrew
  • Release : 16 March 2018
  • ISBN : 032351085X
  • Pages : 760 pages
  • Rating : /5 from reviews
GET THIS BOOKHandbook of Silicon Wafer Cleaning Technology


Download or read book entitled Handbook of Silicon Wafer Cleaning Technology by author: Karen Reinhardt which was release on 16 March 2018 and published by William Andrew with total page 760 pages . This book available in PDF, EPUB and Kindle Format. Handbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet and plasma processing are reviewed, including surface and colloidal aspects. This revised edition includes the developments of the last ten years to accommodate a continually involving industry, addressing new technologies and materials, such as germanium and III-V compound semiconductors, and reviewing the various techniques and methods for cleaning and surface conditioning. Chapters include numerous examples of cleaning technique and their results. The book helps the reader understand the process they are using for their cleaning application and why the selected process works. For example, discussion of the mechanism and physics of contamination, metal, particle and organic includes information on particle removal, metal passivation, hydrogen-terminated silicon and other processes that engineers experience in their working environment. In addition, the handbook assists the reader in understanding analytical methods for evaluating contamination. The book is arranged in an order that segments the various cleaning techniques, aqueous and dry processing. Sections include theory, chemistry and physics first, then go into detail for the various methods of cleaning, specifically particle removal and metal removal, amongst others. Focuses on cleaning techniques including wet, plasma and other surface conditioning techniques used to manufacture integrated circuits Reliable reference for anyone that manufactures integrated circuits or supplies the semiconductor and microelectronics industries Covers processes and equipment, as well as new materials and changes required for the surface conditioning process

Handbook of Silicon Wafer Cleaning Technology

Handbook of Silicon Wafer Cleaning Technology
  • Author : Karen Reinhardt,Werner Kern
  • Publisher : William Andrew
  • Release Date : 2018-03-16
  • Total pages : 760
  • ISBN : 032351085X
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Summary : Handbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet and plasma processing are reviewed, including surface and colloidal aspects. This revised edition includes the developments of the last ten years ...

Handbook of Silicon Wafer Cleaning Technology 2nd Edition

Handbook of Silicon Wafer Cleaning Technology  2nd Edition
  • Author : Karen Reinhardt,Werner Kern
  • Publisher : William Andrew
  • Release Date : 2008-12-10
  • Total pages : 660
  • ISBN : 032351085X
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Summary : The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such ...

Handbook of Semiconductor Wafer Cleaning Technology

Handbook of Semiconductor Wafer Cleaning Technology
  • Author : Werner Kern
  • Publisher : William Andrew Inc.
  • Release Date : 1993-01-01
  • Total pages : 623
  • ISBN : 032351085X
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Summary : Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field....

Handbook of Silicon Wafer Cleaning Technology 2nd Edition

Handbook of Silicon Wafer Cleaning Technology  2nd Edition
  • Author : Karen Reinhardt,Werner Kern
  • Publisher : William Andrew
  • Release Date : 2008-12-10
  • Total pages : 660
  • ISBN : 032351085X
GET BOOK

Summary : The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such ...

Handbook for Cleaning for Semiconductor Manufacturing

Handbook for Cleaning for Semiconductor Manufacturing
  • Author : Karen A. Reinhardt,Richard F. Reidy
  • Publisher : John Wiley & Sons
  • Release Date : 2011-04-12
  • Total pages : 590
  • ISBN : 032351085X
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Summary : This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, ...

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
  • Author : Markku Tilli,Mervi Paulasto-Krockel,Teruaki Motooka,Veikko Lindroos
  • Publisher : William Andrew
  • Release Date : 2015-09-02
  • Total pages : 826
  • ISBN : 032351085X
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Summary : The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), ...

Particle Control for Semiconductor Manufacturing

Particle Control for Semiconductor Manufacturing
  • Author : Donovan
  • Publisher : CRC Press
  • Release Date : 1990-01-26
  • Total pages : 504
  • ISBN : 032351085X
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Summary : There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In...

Ultra Clean Technology Handbook

Ultra Clean Technology Handbook
  • Author : Ohmi
  • Publisher : Routledge
  • Release Date : 2017-11-01
  • Total pages : 944
  • ISBN : 032351085X
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Summary : Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int...

Handbook of Semiconductor Manufacturing Technology

Handbook of Semiconductor Manufacturing Technology
  • Author : Yoshio Nishi,Robert Doering
  • Publisher : CRC Press
  • Release Date : 2017-12-19
  • Total pages : 1720
  • ISBN : 032351085X
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Summary : Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert ...

Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
  • Author : Richard E. Novak,Jerzy Rużyłło
  • Publisher : The Electrochemical Society
  • Release Date : 1996
  • Total pages : 626
  • ISBN : 032351085X
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Summary : Read online Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing written by Richard E. Novak,Jerzy Rużyłło, published by The Electrochemical Society which was released on 1996. Download full Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing Books now! ...

Proceedings of the Second International Symposium on Ultra Clean Processing of Silicon Surfaces

Proceedings of the Second International Symposium on Ultra Clean Processing of Silicon Surfaces
  • Author : Marc Heyns
  • Publisher : Unknown
  • Release Date : 1994
  • Total pages : 378
  • ISBN : 032351085X
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Summary : Read online Proceedings of the Second International Symposium on Ultra Clean Processing of Silicon Surfaces written by Marc Heyns, published by which was released on 1994. Download full Proceedings of the Second International Symposium on Ultra Clean Processing of Silicon Surfaces Books now! Available in PDF, ePub and Kindle....

Fourth European Symposium on Martensitic Transformations

Fourth European Symposium on Martensitic Transformations
  • Author : J. Beyer
  • Publisher : Unknown
  • Release Date : 1997
  • Total pages : 680
  • ISBN : 032351085X
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Summary : Read online Fourth European Symposium on Martensitic Transformations written by J. Beyer, published by which was released on 1997. Download full Fourth European Symposium on Martensitic Transformations Books now! Available in PDF, ePub and Kindle....

Handbook of Silicon Semiconductor Metrology

Handbook of Silicon Semiconductor Metrology
  • Author : Alain C. Diebold
  • Publisher : CRC Press
  • Release Date : 2001-06-29
  • Total pages : 896
  • ISBN : 032351085X
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Summary : Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay...

Laser Applications in Microelectronic and Optoelectronic Manufacturing

Laser Applications in Microelectronic and Optoelectronic Manufacturing
  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 1999
  • Total pages : 212
  • ISBN : 032351085X
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Summary : Read online Laser Applications in Microelectronic and Optoelectronic Manufacturing written by , published by which was released on 1999. Download full Laser Applications in Microelectronic and Optoelectronic Manufacturing Books now! Available in PDF, ePub and Kindle....

Ultra Clean Processing of Semiconductor Surfaces XIII

Ultra Clean Processing of Semiconductor Surfaces XIII
  • Author : Paul W. Mertens,Marc Meuris,Marc Heyns
  • Publisher : Trans Tech Publications Ltd
  • Release Date : 2016-09-05
  • Total pages : 414
  • ISBN : 032351085X
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Summary : This volume contains the proceedings of 13th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2016, Knokke, Belgium, September 12-14, 2016) (www.ucpss.org) and includes studies on cleaning such as particle removal using acoustic enhancement, removal of metallic contamination, pattern collapse of fine flexible and fragile features, wetting and ...