Handbook of Physical Vapor Deposition PVD Processing

Written By D. M. Mattox
Handbook of Physical Vapor Deposition  PVD  Processing
  • Publsiher : Cambridge University Press
  • Release : 19 September 2014
  • ISBN : 9780080946580
  • Pages : 944 pages
  • Rating : 5/5 from 1 reviews
GET THIS BOOKHandbook of Physical Vapor Deposition PVD Processing


Download or read book entitled Handbook of Physical Vapor Deposition PVD Processing by author: D. M. Mattox which was release on 19 September 2014 and published by Cambridge University Press with total page 944 pages . This book available in PDF, EPUB and Kindle Format. This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.

Handbook of Physical Vapor Deposition PVD Processing

Handbook of Physical Vapor Deposition  PVD  Processing
  • Author : D. M. Mattox
  • Publisher : Cambridge University Press
  • Release Date : 2014-09-19
  • Total pages : 944
  • ISBN : 9780080946580
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Summary : This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films ...

Handbook of Physical Vapor Deposition PVD Processing

Handbook of Physical Vapor Deposition  PVD  Processing
  • Author : Donald M. Mattox
  • Publisher : William Andrew
  • Release Date : 1998-12-31
  • Total pages : 944
  • ISBN : 9780080946580
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Summary : This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films ...

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  • Publisher : William Andrew
  • Release Date : 2001-02-01
  • Total pages : 430
  • ISBN : 9780080946580
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Summary : New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. ...

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  • Publisher : CRC Press
  • Release Date : 2009
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  • ISBN : 9780080946580
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Summary : PerspectivesIntroductionNanoscience and Nanotechnology-The DistinctionHistorical PerspectivesAdvanced MaterialsTools of NanoNature's Take on Nano and the Advent of Molecular BiologyThe Nano PerspectiveSocietal Implications of NanoIntroduction to Societal IssuesEthical ImplicationsLegal ImplicationsEnvironmental ImplicationsPublic PerceptionFuture of Nanotechnology NanotoolsCharacterization MethodsCharacterization of NanomaterialsElectron Probe MethodsScanning Probe Microscopy MethodsSpectroscopic MethodsNonradiative and Nonelectron Characterization MethodsFabrication MethodsFabrication of Nano....

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  • Publisher : William Andrew
  • Release Date : 2018-08-21
  • Total pages : 378
  • ISBN : 9780080946580
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Summary : The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and ...

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  • Publisher : Unknown
  • Release Date : 2000
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  • ISBN : 9780080946580
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Summary : Read online Plating and Surface Finishing written by , published by which was released on 2000. Download full Plating and Surface Finishing Books now! Available in PDF, ePub and Kindle....

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  • ISBN : 9780080946580
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Summary : The book summarizes the work and the results of a five year government funded research project as well as subsequent research results about high power diode laser systems and their application in the field of materials processing. The entire technology chain, starting from the semiconductor technology, over cooling mounting and ...

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  • Release Date : 2007
  • Total pages : 298
  • ISBN : 9780080946580
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Summary : Read online Direct Synthesis of Multifunctional Heterostructured Magnetic Nanoparticles in Gas Phase written by Yunhao Xu, published by which was released on 2007. Download full Direct Synthesis of Multifunctional Heterostructured Magnetic Nanoparticles in Gas Phase Books now! Available in PDF, ePub and Kindle....

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  • Publisher : Asm International
  • Release Date : 2002
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  • ISBN : 9780080946580
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Summary : Surface Modification Technologies XV presents the reviewed and edited proceedings of the SMT conference held in November 2001 in Indianapolis, USA. The proceedings describe state-of-the-art surface engineering work in thermal spray, wear-resistant coatings, surface characterization, scanning probe techniques, surface treatment for corrosion and joining, and cadmium and chromium replacement. Contents include: ...

The Cumulative Book Index

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  • Author : Anonim
  • Publisher : Unknown
  • Release Date : 1999
  • Total pages : 212
  • ISBN : 9780080946580
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Summary : Read online The Cumulative Book Index written by , published by which was released on 1999. Download full The Cumulative Book Index Books now! Available in PDF, ePub and Kindle....

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  • Publisher : Unknown
  • Release Date : 2002
  • Total pages : 634
  • ISBN : 9780080946580
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Summary : Vol.1: Deposition and processing of thin films; Vol.2: Characterization and spectroscopy of thin films; Vol.3: Ferroelectric and dielectric thin films; Vol.4: Semiconductor and superconductor thin films; Vol.5: Nanomaterials and magnetic thin flims...

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  • ISBN : 9780080946580
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Summary : This book is a review of the science and technology of the element carbon and its allotropes: graphite, diamond and the fullerenes. This field has expanded greatly in the last three decades stimulated by many major discoveries such as carbon fibers, low-pressure diamond and the fullerenes. These carbon materials are ...

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  • Release Date : 2004
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Summary : Read online Books in Print 2004 2005 written by , published by which was released on 2004. Download full Books in Print 2004 2005 Books now! Available in PDF, ePub and Kindle....

ASM Handbook

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  • Author : ASM International. Handbook Committee
  • Publisher : CRC Press
  • Release Date : 1997-12-01
  • Total pages : 900
  • ISBN : 9780080946580
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Summary : This volume is a comprehensive reference on the basic concepts, methodologies, and information sources dealing with materials selection and its integration with engineering design processes. Contents include contributions from 100+ experts involved with design, materials selection, and manufacturing. Addresses metals, ceramics, polymers, and composites and provides many case histories and examples....